- micro etching
- Металлургия: микротравление
Универсальный англо-русский словарь. Академик.ру. 2011.
micro etching
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Micro-Opto-Electro-Mechanical Systems — (MOEMS) is not a special class of Micro Electro Mechanical Systems (MEMS) but in fact it is MEMS merged with Micro optics which involves sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and… … Wikipedia
Micro contact printing — Figure 1: PDMS master is created by patterning silicon, pouring and curing the PDMS, and peeling away from the substrate … Wikipedia
Alcatel Micro Machining Systems — is a French manufacturer of Deep Reactive Ion Etching Systems. The company s headquarters are in Annecy, France. Alcatel Micro Machining Systems is also called AMMS. History Alcatel Vacuum Technology, based in Annecy (France) has been involved in … Wikipedia
Reactive-ion etching — Gravure ionique réactive La gravure ionique réactive ou gravure par ions réactifs très souvent appelée par son acronyme anglophone, RIE (pour Reactive Ion Etching), est une technique de gravure sèche des semi conducteurs. Il s agit d une… … Wikipédia en Français
Reactive Ion Etching — Gravure ionique réactive La gravure ionique réactive ou gravure par ions réactifs très souvent appelée par son acronyme anglophone, RIE (pour Reactive Ion Etching), est une technique de gravure sèche des semi conducteurs. Il s agit d une… … Wikipédia en Français
Nano and Micro Devices Center — Established 2008 Type Research Center Chairman Robert Lindquist … Wikipedia
Gravure (micro-fabrication) — La gravure (aussi appelée parfois par son nom anglophone, etching) est un procédé utilisée en micro fabrication, qui consiste à retirer une ou plusieurs couches de matériaux à la surface d un wafer. La gravure est une étape critique, extrêmement… … Wikipédia en Français
Deep reactive-ion etching — (DRIE) is a highly anisotropic etch process used to create deep penetration, steep sided holes and trenches in wafers, with aspect ratios of 20:1 or more. It was developed for microelectromechanical systems (MEMS), which require these features,… … Wikipedia
Centrifugal Micro-fluidic Biochip — The centrifugal mico fluidic biochip or centrifugal micro fluidic biodisk is a type of lab on a chip technology that can be used to integrate processes such as separating, mixing, reaction and detecting molecules of nano size in a single piece of … Wikipedia
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
Microfabrication — Synthetic detail of a micromanufactured integrated circuit through four layers of planarized copper interconnect, down to the polysilicon (pink), wells (greyish) and substrate (green) Microfabrication is the term that describes processes of… … Wikipedia
